This document is designed to allow the user to assess, on a regular basis, several key parameters of an 
X-ray photoelectron spectrometer. It is not intended to provide an exhaustive performance check, but 
instead provides a rapid set of tests that can be conducted frequently.
Aspects of instrument behaviour covered by this document include the vacuum, measurements of 
spectra of conductive or non-conductive test specimens and the current state of the X-ray source. Other 
important aspects of the instrument performance (e.g. lateral resolution) fall outside the scope of this 
document.
The document is intended for use with commercial X-ray photoelectron spectrometers equipped with a 
monochromated Al Kα X-ray source or with an unmonochromated Al or Mg Kα X-ray source.nd edition 2018-11 Surface chemical analysis — X-ray photoelectron spectroscopy — Procedures for assessing the day- to-day performance of an X-ray photoelectron spectrometer Analyse chimique des surfaces — Spectroscopie de photoélectrons X — Modes opératoires d'évaluation de la performance au jour le jour d'un spectromètre de photoélectrons X Reference number ISO 16129:2018(E) ？ ISO 2018 ISO 16129: 標(biāo)準(zhǔn)截圖